| 真空溅射氮化钛的研究 |
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| 引用本文： | 陈君才,芮鸿. 真空溅射氮化钛的研究[J]. 昆明理工大学学报(自然科学版), 1989, 0(1) |
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| 作者姓名： | 陈君才 芮鸿 |
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| 作者单位： | 昆明工学院金属材料系，昆明工学院金属材料系 |
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| 摘 要： | 本文借助三极反应溅射TiN炉,研究了高速钢刀具进行真空溅射TiN时,其TiN沉积层厚度、残余应力、基体硬度等特性随不同沉积时间的变化规律;同时初步分析了间断溅射对沉积层形态的影响。研究证明:采用真空溅射沉积TiN的高速钢工模具可显著地提高使用性能,具有明显的经济效益。
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| 关 键 词： | 阴极真空溅射 硬度 厚度 残余应力 |
A Study of Vacuum Sputtering of Titanium Nitride |
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| Chen Juncai Rui Hong. A Study of Vacuum Sputtering of Titanium Nitride[J]. Journal of Kunming University of Science and Technology(Natural Science Edition), 1989, 0(1) |
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| Authors: | Chen Juncai Rui Hong |
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| Affiliation: | Department of Metallic Materials |
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| Abstract: | The TiN Vacuum Sputtering process of high speed steel tools was investigated by means of three electrodes reaction sputtering TiN instrument. The rules governing the variation of thickness of TiN Coating residual stress, matrix hardness with the coating time are studied. In the meantime, the influ- ence of uncontinuous Sprttering on coating form is analysed. The experimental results prove that the operational performance of TiN coated high speed steel tools may be increased evidently. It possesses considerable economic benefits. |
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| Keywords: | sputter hardness thickness residual stress. |
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