光切法在动态表面粗糙度检测中的应用

应用光切显微镜、CCD摄像机、虚拟仪器和图像处理技术开发了表面粗糙度动态检测系统,利用光切法获得运动表面形貌,再使用图像处理技术提取轮廓特征计算评定参数。通过与触针式仪器进行测量对比实验,论证了检测系统能达到较高的精度。应用检测系统进行了动态检测实验,分析了样本表面的振动和运动速度对检测系统的影响。实验证明,在被测表面的振动幅度小于景深的前提下,该图像检测系统能够应用于动态检测表面粗糙度,适用的速度范围可达到:0￣2000rpm(3.14m/s)。

Application of Light-Section Method to Roughness Measurement on Dynamic Surface

A dynamic measurement system of surface roughness was developed which consists of light-section microscope and CCD camera as well as image processing software. The dynamic surface profile can be obtained by light-section method. The evaluation parameter of roughness can be calculated according to the surface profile detected with image process technology. Comparing the mea-surement results with that of stylus instrument it is proved that the system has good measurement accuracy. The effect of surface vi-bration and speed on dynamic measurement was analyzed in experiment. The result shows that the system can be applied to dynamic measurement of surface roughness at the rotate speed ranged from 0 to 2000rpm(3.14m/s), when the amplitude of surface vibration is less than the depth of field of microscope.