A XRD study of Co/Au multilayers using a laboratory microdiffractometer |
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| Authors: | E. Bontempi L.E. Depero |
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| Affiliation: | INSTM and Laboratorio di Strutturistica Chimica, Dipartimento di Ingegneria Meccanica, Università di Brescia, Via Branze, 38, 25123 Brescia, Italy |
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| Abstract: | In this paper we show that by the analysis of 2D images collected with a laboratory X-ray microdiffractometer it is possible to non-destructively evaluate the structure, the microstructure, and the preferred orientation of films. In particular, the structural analysis of Co/Au multilayers on Si(1 0 0) deposited at different Ar pressures are reported and discussed. |
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| Keywords: | Multilayer XRD XRD2 |
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