Auto-correlation function analysis of phase formation in iron ion-implanted amorphous silicon layers |
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| Authors: | TH Yang LJ Chou |
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| Affiliation: | Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, ROC |
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| Abstract: | High-resolution transmission electron microscopy (HRTEM) in conjunction with autocorrelation function (ACF) analysis have been applied to investigate the evolution of structural order in iron ion-implanted amorphous silicon layers. β-FeSi2 nanocrystallites as small as 5 nm in size were detected in 600 °C annealed for 60 min a-Si layers. The embedded nanocrystalline β-FeSi2 was found to grow in the interlayer with annealing temperature. |
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| Keywords: | β-FeSi2 Nanocrystallite Iron implantation |
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