| 硬质合金基体上金刚石膜的XRD研究 |
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| 引用本文： | 钟万里,匡同春,成晓玲,叶兰莹,余忠民. 硬质合金基体上金刚石膜的XRD研究[J]. 硬质合金, 2000, 17(4): 233-235 |
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| 作者姓名： | 钟万里 匡同春 成晓玲 叶兰莹 余忠民 |
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| 作者单位： | 1. 广东省电力工业试验研究所，广州，510606
2. 广东工业大学，广州市510090 |
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| 基金项目： | 广东省博士启动基金、广东省高教厅重点课题联合资助项目 |
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| 摘 要： | 采用直流等离子体射流CVD法在硬质合金 (WC + 8wt.%Co)基体上生长金刚石膜 ,主要借助XRD分析方法对CVD金刚石膜的微观结构和残余应力进行了研究 ,探讨了CVD金刚石膜中残余应力的形成及其对金刚石膜粘附性能的影响。研究结果表明 :CVD金刚石膜中通常存在GPa数量级的残余压应力 ,膜中存在适中的残余压应力 ,有利于CVD金刚石膜获得最佳的粘附性能
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| 关 键 词： | 金刚石膜 微观结构 残余应力 粘附性能 |
THE XRD STUDY OF DIAMOND FILM ON CEMENTED CARBIDE SUBSTRATE |
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| Zhong Wanli,Kuang Tongchun,Cheng Xiaoling,Ye Lanying,Yu Zhong min. THE XRD STUDY OF DIAMOND FILM ON CEMENTED CARBIDE SUBSTRATE[J]. Cemented Carbide, 2000, 17(4): 233-235 |
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| Authors: | Zhong Wanli Kuang Tongchun Cheng Xiaoling Ye Lanying Yu Zhong min |
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| Abstract: | The diamond films have been produced on cemented carbide(WC 8wt%Co) substrates by method of DC plasma jet CVD. The microstructures and residual stresses of CVD diamond films have been studied mainly by analytical method of XRD. The formation of residual stresses in diamond films and its effect on adhesive properties of diamond films have been discussed. the results show as follows; Residual pressures with Gpa order often exist in CVD diamond films, a appropriate residual pressure exist in film is beneficial to get the best adhesive properties for CVD diamond film. |
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| Keywords: | diamond film microstructure residual stress adhesive property |
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