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Finite element analysis and experimental validation of suppression of span in optical MEMS pressure sensors |
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| Authors: | Mishra Shivam Balasubramaniam R. Chandra Sudhir |
| Affiliation: | 1.Homi Bhabha National Institute, Mumbai, 400094, India ;2.Bhabha Atomic Research Centre, Mumbai, 400085, India ;3.Electronics and Communication Engineering Department, Bennett University, Greater Noida, Uttar Pradesh, 201310, India ; |
| Abstract: | Microsystem Technologies - An optical pressure sensor working on the principle of Fabry–Perot Interferometer (FPI) is designed for pressures range of 1 bar absolute. The sensor is... |
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