微机械臂激光驱动机理分析

对一种激光驱动的微臂机构的运动机理进行分析。该微机械臂的典型长度在亚毫米量级，宽度和厚度在数微米量级。微臂同一个半导体激光器单片集成或混合集成成为一个整体。当激光器输出光脉冲时，微臂将发生振动。文中采用一端固定、一端自由运动的长方形悬臂的力学模型，分析比较了激光的光压作用和激光的热效应两种机理。根据推导出的公式估算，得出了在现有条件下激光驱动的基本机理是光的热效应的结论。对这种微臂的运动特性作了初步的讨论。

Mechanism of laser driving of micro-mechnical beam

The mechanism of laser driving of a micro mechnical beam is analyzed. The micro beam with its length in sub millimeter range and its width and thickness in several micrometer range, is integrated monolithically or in hybrid with a diode laser. When the laser emits a pulsed optical beam, the micro mechanical beam will vibrate accordingly. Mechanisms of optical pressure and opto thermal effect of the laser beam are analyzed and compared by using a static and dynamic model of a rectangle beam with one end fixed and another end free. According to the formulas deduced, it is concluded that the main mechanism of the laser driving is thermal effect under present conditions. The characteristics of the micro beam movement by the thermal effect are evaluated and discussed.