空心阴极N2+等离子体放电电子温度的研究

利用双层辉光放电空心阴极效应，针对N2发射光谱相对强度的变化，采用SⅡ-Ⅳ型全息凹面光栅单色仪对各种工艺参数条件下的光谱进行测绘，获得一系列谱线及测量数据。通过玻尔兹曼方程式求得不同工艺条件下的N^2＋等离子体的电子温度。并分析了工件电压、源极电压和工作气压对电子温度的影响。结果表明：当工作气压和工件电压一定时，电子温度随源极电压的升高先减小后增大，最后又减小；当源电压一定时，电子温度随工件电压和工作气压的升高而明显减小，并且其减小幅度随源极电压的升高而逐渐降低；当工作气压一定时，工件电压的变化较源极电压的变化对电子温度的影响大。

Electron Temperature of Hollow-Cathode N2 + Discharge Plasma

Electron temperatures in the double glow hollow-cathode,N~(2+) discharge plasma,generated under different conditions,were studied by optical emission spectroscopy.Influence of various factors,including work piece voltage,source voltage and N_2 pressure,on the electron temperature was discussed.The results show that at a given N_2 pressure and work piece voltage,as the source voltage increases,the electron temperature first dicreases,then increases and finally drops;whereas at a fixed source voltage,the electron temperature markedly decreases with the increase of both the N_2 pressure and the work piece voltage,and its decrease magnitude reduces with the increase of the source voltage.Moreover,when N_2 pressure remains unchanged,the work piece voltage affects the electron temperature much more strongly than the source voltage does.