| 微射流驱动弯曲测试法测量微结构的弹性模量 |
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| 引用本文： | 陈樟,苏伟,万敏.微射流驱动弯曲测试法测量微结构的弹性模量[J].微纳电子技术,2009,46(8). |
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| 作者姓名： | 陈樟 苏伟 万敏 |
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| 作者单位： | 1. 中国工程物理研究院,电子工程研究所,四川,绵阳621900
2. 北京航空航天大学机械工程及自动化学院,北京,100191 |
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| 摘 要： | 提出了一种新颖的用于测量微结构力学性能的弯曲测试法——微射流驱动的弯曲测试法(microjet-driving microbending test method,JDBT)。该方法利用气体微射流连续冲击微结构,使之发生弯曲变形,通过获取结构的尺寸参数和形变位移,并代入结构的变形公式,从而反解出材料的力学性能参量。利用动量定理推导了微射流作用力公式,对某型号石英摆片式加速度计的敏感结构进行了理论建模,并用COMSOL MULTIPHYSICS有限元软件对理论公式进行了修正,接着通过JDBT实验得到了不同流量下的结构位移,最后将结构尺寸和结构形变位移代入修正后的理论公式,从而得到了石英玻璃的弹性模量约为71GPa,比纳米压痕仪测试的结果要小14%左右,与文献中提到的结果吻合较好。
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| 关 键 词： | 微纳米技术 微电子机械系统 力学性能 微梁弯曲法 微射流 石英玻璃 |
Measurement of Elastic Modulus of Microstructure by Microjet Driving Microbending Test Method |
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| Chen Zhang,Su Wei,Wan Min.Measurement of Elastic Modulus of Microstructure by Microjet Driving Microbending Test Method[J].Micronanoelectronic Technology,2009,46(8). |
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| Authors: | Chen Zhang Su Wei Wan Min |
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| Affiliation: | 1.Institute of Electronics Engineering;China Academy of Engineering Physics;Mianyang 621900;China;2.School of Mechanical Engineering and Automation;Beihang University;Beijing 100191;China |
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| Abstract: | A novel microjet-driving micro-beam bending test method(JDBT) was proposed for characterization of mechanical properties of microstructures.In this method,the microstructure was continuously impacted to bend by the gaseous microjet.The parameters of the structure size and displacements were obtained,which were put into the distortion formula of structure,then the characteristic parameters of mechanical properties of materials were inverse solution.Firstly,an equation of the micro-jet force was deduced accor... |
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| Keywords: | micro and nanotechnology MEMS mechanical properties micro beam bending method micro jet quartz glass |
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