| GCr15钢等离子体基离子注入Ti和C混合层的XPS研究 |
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| 引用本文： | 孙明仁,夏立芳,孙跃.GCr15钢等离子体基离子注入Ti和C混合层的XPS研究[J].真空科学与技术学报,1999(1). |
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| 作者姓名： | 孙明仁 夏立芳 孙跃 |
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| 作者单位： | 哈尔滨工业大学!哈尔滨150001(孙明仁，夏立芳，孙跃，马欣新，李光)，哈尔滨理工大学!哈尔滨150080(张振信) |
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| 摘 要： | 用X射线光电子谱研究了GCr15轴承钢不平衡磁控溅射沉积Ti,继之等离子体基离子注入碳的等离子体基离子注入混合层的C ,Ti浓度深度分布及其化学结构。表明混合层的最表层为碳沉积层 ,其C 1s谱峰呈类金刚石特征 ,喇曼光谱肯定了这一特征。碳沉积层下面为C Ti混合区 ,Ti和C各以游离态和化合物态存在。混合层内Ti和C浓度沿层深连续变化 ,无突变区 ,在原Ti沉积层与基材轴承钢发生反冲增强扩散现象
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| 关 键 词： | 等离子体基离子注入混合 XPS分析 化学态 |
XPS Studies of the Titanium and Carbon Plasma based ion implanted Layers of GCr15 Steel |
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| Sun Mingren,Xia Lifang,Sun Yue,Ma Xinxin,Li Guang.XPS Studies of the Titanium and Carbon Plasma based ion implanted Layers of GCr15 Steel[J].JOurnal of Vacuum Science and Technology,1999(1). |
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| Authors: | Sun Mingren Xia Lifang Sun Yue Ma Xinxin Li Guang |
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| Abstract: | Ti and C mixed layers were grown with unbalanced Ti magnetron sputtering followed by carbon plasma based ion implantation on GCr15 bearing steel substrate.The mixed layers were studied with XPS and Raman spectroscopy to understand the chemical states of titanium and carbon.The XPS results showed that the carbon precipitates on the first surface layer.The C 1 s peak position indicated that the carbon has a diamond like structure.And the structure was further confirmed by Raman spectroscopy.Titanium and carbon coexist underneath the carbon surface layer either in free atomistic states or in the form of titanium carbide.The contents of Ti and C decrease monotonously with an increase of the depth and no abrupt variation in either Ti or C content was observed.However,strong interdiffusion of Fe and Ti was observed at the interface of Ti and GCr15 bearing steel substrate possibly because of ion collision. |
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| Keywords: | Plasma based ion implantation mixing X-ray photoelectron spectroscopy analysis Chemical state |
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