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抗共振反射集成光学传感器的研究进展
引用本文:吴英才,顾铮(一先),袁一方. 抗共振反射集成光学传感器的研究进展[J]. 传感器与微系统, 2005, 24(11): 1-3
作者姓名:吴英才  顾铮(一先)  袁一方
作者单位:1. 广东湛江海洋大学,信息学院,广东,湛江,524025;上海理工大学,光电学院,上海,200093
2. 上海理工大学,光电学院,上海,200093
基金项目:上海市教委"曙光计划" , 上海市教育发展基金
摘    要:抗共振反射光波导(ARROW)具有与传统光波导所不同的传播特性。利用覆盖层的抗共振反射性质,ARROW传播单模、高阶模被泄漏到基体。基于折射率的变化,抗共振反射传感器对物理量、化学量和生物分子间的相互作用有很高的敏感性。介绍了ARROW的结构、传感器的工作原理以及最新研究进展。由于可采用CMOS工艺制作波导,且能与光探测器在一块集成,抗共振反射传感器将具有广阔的应用前景。

关 键 词:抗共振反射光波导  集成光学  折射率  传感器
文章编号:1000-9787(2005)11-0001-03
收稿时间:2005-05-21
修稿时间:2005-05-21

Development of integrated optical wave-guided sensors based on antiresonant reflection
WU Ying-cai,GU Zheng-tian,YUAN Yi-fang. Development of integrated optical wave-guided sensors based on antiresonant reflection[J]. Transducer and Microsystem Technology, 2005, 24(11): 1-3
Authors:WU Ying-cai  GU Zheng-tian  YUAN Yi-fang
Affiliation:1. Coil of Info, Zhanjiang Ocean University, Zhanjiang 524025, China; 2. Coil of Optical and Eict Engin, University of Shanghai for Science and Technology, Shanghai 200093, China
Abstract:The propagating properties of antiresonant reflecting optical waveguide(ARROW) are different from conventional ones.According to features of antiresonant reflection in cladding layers,it is only the base mode that is allowed to propagate on the ARROW,and high modes are leaked into substrate.Based on variation of refractive index,ARROW sensors are high sensitive to physical and chemical quantity and interaction of bio-molecule.The ARROW structure,operating principle and last development of sensors are introduced.As the waveguides can be developed by CMOS techniques,and they are easily to be integrated with photodetectors on a chip,the future application of ARROW sensors is prospected.
Keywords:antiresonant reflecting optical waveguide(ARROW)  integrated optics(IO)  refractive index  sensor
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