Influence of iron content on electrical characteristics and thermal stability of LEC indium phosphide

The Hall mobilities (conductivity type) measured on many Fe-doped InP wafers have been used as a parameter for material assessment. The samples can essentially be assigned to three groups. Interpretation of the experimental data is given for each group of samples. Furthermore, we report the results of electrical measurements on annealed InP and show the kind of correlation existing between the electrical characteristics of as-grown and annealed InP. Finally, we report a study on the homogeneity of Fe-doped InP on a macroscale. It is seen that the experimental resistivity profiles along the wafer diameters are a function both of the Fe and shallow inpurities profiles.