| 磁过滤直流真空阴极弧制备含铬类金刚石膜的结构及其性能研究 |
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| 引用本文： | 祝土富,沈丽如,徐桂东,金凡亚. 磁过滤直流真空阴极弧制备含铬类金刚石膜的结构及其性能研究[J]. 材料工程, 2009, 0(11) |
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| 作者姓名： | 祝土富 沈丽如 徐桂东 金凡亚 |
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| 作者单位： | 核工业西南物理研究院,成都,610041 |
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| 摘 要： | 采用磁过滤直流真空阴极弧沉积技术在单晶硅片、载玻片、不锈钢片基体上制备了含铬类金刚石(Cr-DLC)膜.用光学显微镜、椭偏仪、分光光度计、X射线光电子能谱(XPS)、X射线衍射能谱(XRD)、Raman光谱、纳米硬度计、摩擦磨损仪、洛氏硬度计检测了薄膜的组分结构、光学、力学等相关特性.结果表明,硅片上的薄膜厚度为47.6nm,碳含量为89%,s p~3键占碳含量的55.15%.不锈钢片上的薄膜具有典型的DLC膜Raman光谱特征,在空气中的摩擦系数约为0.1,耐磨性能优良,膜与基体的结合性能良好.
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| 关 键 词： | 磁过滤真宅阴极弧 含铬DLC膜 |
Structure and Properties of Cr-containing Hydrogenated Diamond-like Carbon Films Deposited by DC Filtered Cathodic Vacuum Arc Technology |
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| ZHU Tu-fu,SHEN Li-ru,XU Gui-dong,JIN Fan-ya. Structure and Properties of Cr-containing Hydrogenated Diamond-like Carbon Films Deposited by DC Filtered Cathodic Vacuum Arc Technology[J]. Journal of Materials Engineering, 2009, 0(11) |
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| Authors: | ZHU Tu-fu SHEN Li-ru XU Gui-dong JIN Fan-ya |
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| Affiliation: | ZHU Tu-fu,SHEN Li-ru,XU Gui-dong,JIN Fan-ya(Southwestern Institute of Physics,Chengdu 610041,China) |
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| Abstract: | Cr-containing hydrogenated diamond-like carbon(Cr-DLC) films were deposited on stainless steel plate,monocrystalline silicon wafer and microscope slide glass by DC filtered cathodic vacuum arc technology.The composition,structure and properties of Cr-DLC films were investigated by spectroscopic ellipsometer,X-ray photoelectron spectroscopy(XPS),powder X-ray diffraction(XRD),spectrophotometer,Raman spectroscopy,nanoindenter,ball-on-disk tribometer,Rockwell apparatus and optical microscope.It was shown that t... |
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| Keywords: | DC filtered cathodic vacuum arc Cr-DLC films |
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