基于模型识别技术的高温微型压力传感器

高温压力传感器应用在很多领域,由于高温将使放大电路工作失效,因而采用将放大电路与传感器件分离的设计方案是解决高温测量的方法之一。介绍一种将放大电路与传感器件分离的基于模型识别技术的微型电容式压力传感器。传感器件由MEMS工艺来实现,信号激励与信号处理由计算机来完成。对电路的工作过程进行了计算机仿真和试验,并给出了微型高温压力传感器的MEMS工艺设计流程。

High temperature micro pressure sensor based on model identification

High temperature pressure sensor is applied in many fields. However, the amplifying circuit may be invalidate at high temperature. One way to solve this problem is to separate the amplifying circuit and sensor. A kind of high temperature micro pressure sensor based on model identification using this method is introduced, which is realized by MEMS process. Signal stimulation and disposal are accomplished by computer. The circuit is simulated and tested. And the MEMS process of the high temperature micro pressure sensor is designed.