Structural transformation induced by nitrogen implantation in thin metal films |
| |
| Affiliation: | 1. College of science, Dalian Maritime University, Dalian 116026, China;2. Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China;3. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, Dalian 116024, China;4. Southwestern Institute of Physics, Chengdu 610041, China |
| |
| Abstract: | High dose nitrogen implantation was carried out in gadolinium, cobalt, aluminium and copper thin films to study the implantation-induced phase formation. It is concluded that the presence or absence of an equilibrium nitride after implantation is directly related to the structural correlation between the metal matrix and the nitride. The formation of a nitride would be retarded or even inhibited if the required structural transformation is difficult to achieve. These results are believed to be attributable to the transient thermodynamic and kinetic conditions during ion irradiation. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
