| 压电超声微电机混合结构定子的固有频率特性分析 |
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| 引用本文： | 张健 沈德新. 压电超声微电机混合结构定子的固有频率特性分析[J]. 功能材料与器件学报, 1997, 3(2): 95-102 |
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| 作者姓名： | 张健 沈德新 |
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| 作者单位： | 中国科学院上海冶金研究所传感技术国家重点实验室 |
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| 基金项目： | 国家攀登计划B“微电子机械系统”资助项目 |
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| 摘 要： | 压电超声微电机是依靠定子振动变换能的功率器件，定子性能将直接关系到微电机能否实现，本文采用Ｒａｙｌｅｉｇｈ－Ｒｉｔｚ方法来分析机械中经常采用的多层膜结构（混合结构）定子的固有振动特性，推导中考虑了平面应力和弯曲应力对固有频率的影响，模拟计算和实验结果符合得较好，此外还讨论了定子有关参数对固有频率的影响。
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| 关 键 词： | 固有频率 压电超声微电机 微电机 多层膜 |
ANALYZING THE INTRINSIC FREQUENCY OF HYBRID STRUCTURE STATORS IN PIEZOELECTRIC MICROMOTORS |
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| ZHANG Jian,SHEN Dexin,WANG Weiyuan. ANALYZING THE INTRINSIC FREQUENCY OF HYBRID STRUCTURE STATORS IN PIEZOELECTRIC MICROMOTORS[J]. Journal of Functional Materials and Devices, 1997, 3(2): 95-102 |
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| Authors: | ZHANG Jian SHEN Dexin WANG Weiyuan |
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| Abstract: | Piezoelectric micromotors are a kind of transducers depending on vibration of stator The properties of the stator determine the realization of micromotor directly In this paper, we theoretically calculate the intrinsic frequency of the hybrid structure stator for the first time The in plane stress and flexural stress are considered reasonably The calculated data are in excellent agreement with the experimental results In addition, the influence of some parameters on intrinsic frequency is also discussed |
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| Keywords: | Hybrid structure stator stress intrinsic frequency deflection |
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