| 电子式真空阴极弧离子镀引弧器的研制 |
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| 引用本文： | 李刘合,夏立芳,白羽. 电子式真空阴极弧离子镀引弧器的研制[J]. 真空科学与技术学报, 1999, 19(6) |
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| 作者姓名： | 李刘合 夏立芳 白羽 |
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| 作者单位： | 哈尔滨工业大学材料学院!哈尔滨150001 |
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| 摘 要： | 研制了电子式真空阴极弧离子镀引弧器 ,分析了其工作原理及工作时序 ,给出了它的关键部分的电路 ,介绍了它的离子镀引弧器的性能及特点。
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| 关 键 词： | 真空阴极弧离子镀 引弧器 电路 |
A Study of Vacuum Cathodic Arc Electronic Igniter Used in Vacuum Arc Deposition |
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| Li Liuhe,Xia Lifang,Bai Yu,Ma Xinxin,Sunyue. A Study of Vacuum Cathodic Arc Electronic Igniter Used in Vacuum Arc Deposition[J]. JOurnal of Vacuum Science and Technology, 1999, 19(6) |
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| Authors: | Li Liuhe Xia Lifang Bai Yu Ma Xinxin Sunyue |
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| Abstract: | An electronic `spark' igniter used in vacuum arc deposition was developed.The operating principle and wave procedures were analyzed.Some key electric circuits and the characteristics were also discussed. |
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| Keywords: | Vacuum cathodic arc evaporation Igniting unit Electric circuits |
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