An efficient spectroscopic detection system for cathodoluminescence mode scanning electron microscopy (SEM)

A detection system for analytical cathodoluminescence (CL) mode scanning electron microscopy (SEM) is described. This incorporates a cold stage, an efficient light collector, a monochromator and a photomultiplier and used the photon counting technique. The efficiency of the component subsystems was optimized and calibrated, and the performance of alternative light collecting and monochromating equipment is compared. The operation of the photon counter is discussed. The digital output of the photon counter was fed into a multichannel scaler and thence to a computer. This was used to correct the observed count rate with the calibrated spectral variations in the performance of the detection system. Spectra obtained at both room temperature and liquid nitrogen temperacure and monochromatic and panchromatic SEM micrographs are given as examples illustrating the value of this technique. The factors governing the performance of the system are discussed. The forms of noise in the signal and in the detection system are described and the means for minimizing, avoiding or correcting for them are dealt with. Sources of spurious signals in the SEM are treated.