| 摘 要： | Fine measuring instruments, precision machine tools and superfinishing equipments are highly sensitive to environmental vibration. Therefore, it is necessary to provide a vibration isolator with satisfactory performance. The precision vibration isolation table we designed and developed is supported by three air springs. Each air spring consists of one bellows and two air chambers, a main air chamber and an auxiliary air chamber. Between the two air chambers, there is an adjustable damping hole. The characteristics of this isolation table are: 1). the natural frequencies of the isolation system are very low; 2). the mass center of the system is close to the
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