Modified sol-gel process for preparation of lead zjrconate titanate thin films |
| |
Authors: | Chi K. Kwok Seshu B. Desu Dilip P. Vijay |
| |
Affiliation: | a Department of Materials Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA |
| |
Abstract: | A modified precursor preparation method is suggested for sol-gel processing of better quality PZT thin films. The PZT precursor, prepared using Pb acetate, Ti isopropoxide and Zr n-propoxide, was modified by changing the order of precursor mixing. It was found that there was a dramatic change in the shelf-life of the precursor and in the electrical properties of the PZT films. The processing parameters have been optimized and a sol-gel processing technique is suggested to obtain consistent and high quality PZT films. The films show improved electrical properties. |
| |
Keywords: | |
本文献已被 InformaWorld 等数据库收录! |
|