Boron nitride coatings of steel and graphite produced with a low pressure r.f. plasma |
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| Authors: | O Gafri A Grill D Itzhak A Inspektor R Avni |
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| Affiliation: | Materials Engineering Department, Ben-Gurion University of the Negev, Beer-Sheva, Israel;Division of Chemistry, Nuclear Research Centre Negev, Beer-Sheva, Israel |
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| Abstract: | Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH3 and BCl3. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described. |
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