Boron nitride coatings of steel and graphite produced with a low pressure r.f. plasma |
| |
Authors: | O. Gafri A. Grill D. Itzhak A. Inspektor R. Avni |
| |
Affiliation: | Materials Engineering Department, Ben-Gurion University of the Negev, Beer-Sheva, Israel;Division of Chemistry, Nuclear Research Centre Negev, Beer-Sheva, Israel |
| |
Abstract: | Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH3 and BCl3. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |
|