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Noise characterization in millimeter sized micromanipulation systems |
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| Authors: | M Boudaoud Y Haddab Y Le Gorrec P Lutz |
| Affiliation: | FEMTO-ST Institute, UMR CNRS 6174 – UFC/ENSMM/UTBM Automatic Control and Micro-Mechatronic Systems Department (AS2M), 24 rue Alain Savary, 25000 Besançon, France |
| Abstract: | |
| Keywords: | Environmental noise Micromanipulation systems Nanometer vibrations Characterization of noise sources Finite difference modeling |
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