| 基于压电扫描管动态特性分析的AFM成像方法研究 |
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| 引用本文： | 董晓坤,方勇纯,周娴玮,张玉东.基于压电扫描管动态特性分析的AFM成像方法研究[J].高技术通讯,2008,18(1):54-58. |
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| 作者姓名： | 董晓坤 方勇纯 周娴玮 张玉东 |
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| 作者单位： | 南开大学信息技术科学学院机器人研究,天津,300071 |
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| 基金项目： | 国家自然科学基金
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天津市应用基础研究项目
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教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 针对原子力显微镜(AFM)在高速扫描下成像误差大的缺点,提出了一种基于压电扫描管动态特性的改进成像方法,并对这种成像方法的性能进行了理论分析和实验验证.分析和实验结果表明,该成像方法可以较好地处理压电扫描管的动态特性,有效地提高 AFM 在 Z 方向上的成像精度,因此得到的扫描图像能够更加真实地反映样品的形貌.
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| 关 键 词： | 原子力显微镜 成像技术 压电扫描管 动态特性 |
| 修稿时间： | 2007年5月8日 |
An AFM imaging method based on analysis of piezo-scanner's dynamic characteristic |
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| Dong Xiaokun,Fang Yongehun,Zhou Xianwei,Zhang Yudong.An AFM imaging method based on analysis of piezo-scanner's dynamic characteristic[J].High Technology Letters,2008,18(1):54-58. |
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| Authors: | Dong Xiaokun Fang Yongehun Zhou Xianwei Zhang Yudong |
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| Affiliation: | Dong Xiaokun Fang Yongchun Zhou Xianwei Zhang Yudong (Institute of Robotics , Automatic Information System,Nankai University,Tianjin 300071) |
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| Abstract: | An improved imaging method based on the piezo-scanner's dynamics was presented to remedy high-speed scanning atomic force microscopes(AFMs)' fault of imprecise imaging along Z direction.The performance of the method was analysed theoretically and verified by experiment.The results showed that the method had the advantage in processing dy- namic characteristics of the piezo-scanner and the effectiveness in improvement of AFM' s imaging precision along Z di- rection,and the scanning images it gave reflected t... |
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| Keywords: | atomic force microscopy imaging technology piezo-scanner dynamic characteristic |
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