| AlN薄膜的成分,相结构和氧化性能 |
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| 引用本文： | 夏立芳,王佐诚,孙跃,马欣新,陈士芳.AlN薄膜的成分,相结构和氧化性能[J].材料研究学报,1995,9(4):361-363. |
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| 作者姓名： | 夏立芳 王佐诚 孙跃 马欣新 陈士芳 |
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| 作者单位： | 哈尔滨工业大学 |
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| 摘 要： | 用Ｘ射线光电子能谱（ＸＰＳ）剥层分析方法，研究ＡｌＮ薄膜在大气中加热时的氧化性能，结果表明，常温时ＡｌＮ薄膜稳定；在７００℃加热时，Ａｌ２Ｏ３膜开发增厚，ＡｌＮ被氧化，加热温度愈高ＡｌＮ被氧化得愈剧烈。
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| 关 键 词： | 薄膜 氧化 靶材 气相介质 氮化铝 |
| 收稿时间： | 1995-08-25 |
| 修稿时间： | 1995-08-25 |
ON THE COMPOSITION, PHASE STRUCTURE AND OXIDIZED PROPERTY OF AIN FILMS |
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| XIA Lifang,WANG Zuochen,SUN Yue,MA Xinxin,CHEN Shifang.ON THE COMPOSITION, PHASE STRUCTURE AND OXIDIZED PROPERTY OF AIN FILMS[J].Chinese Journal of Materials Research,1995,9(4):361-363. |
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| Authors: | XIA Lifang WANG Zuochen SUN Yue MA Xinxin CHEN Shifang |
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| Affiliation: | XIA Lifang,WANG Zuochen,SUN Yue,MA Xinxin,CHEN Shifang(Harbin Institute of Technology) |
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| Abstract: | The composition, phase structure and oxidized property of AIN films heated in atmosphere at different temperature have been investigated with X-ray photoelectron spectroscopy(XPS) in this paper.The results showed that about 60nm thick of Al2O3 film on the |
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| Keywords: | AIN film oxidized property thermodynamics |
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