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一种基于保角变换的环形栅晶体管用作ESD防护器件的建模方法
引用本文:张甲,杨海钢,孙嘉斌,余乐,韦援丰. 一种基于保角变换的环形栅晶体管用作ESD防护器件的建模方法[J]. 半导体学报, 2014, 35(8): 085001-7
作者姓名:张甲  杨海钢  孙嘉斌  余乐  韦援丰
基金项目:国家自然科学基金;创新团队国际合作伙伴计划
摘    要:This paper proposes a novel technique for modeling the electrostatic discharge (ESD) characteristic of the enclosed-gate layout transistors (ELTs). The model consists of an ELT, a parasitic bipolar transistor, and a substrate resistor. The ELF is decomposed into edge and comer transistors by solving the electrostatic field problem through the conformal mapping method, and these transistors are separately modeled by BSIM (Berkeley Short- channel IGFET Model). Fast simulation speed and easy implementation is obtained as the model can be incorporated into standard SPICE simulation. The model parameters are extracted from the critical point of the snapback curve, and simulation results are presented and compared to experimental data for verification.

关 键 词:寄生双极晶体管  静电放电  映射方法  保护装置  建模  晶体管模型  SPICE仿真  基础

Modeling of enclosed-gate layout transistors as ESD protection device based on conformal mapping method
Zhang Ji,Yang Haigang,Sun Jiabin,Yu Le and Wei Yuanfeng. Modeling of enclosed-gate layout transistors as ESD protection device based on conformal mapping method[J]. Chinese Journal of Semiconductors, 2014, 35(8): 085001-7
Authors:Zhang Ji  Yang Haigang  Sun Jiabin  Yu Le  Wei Yuanfeng
Affiliation:Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Academy of Sciences, Beijing 100049, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Abstract:This paper proposes a novel technique for modeling the electrostatic discharge (ESD) characteristic of the enclosed-gate layout transistors (ELTs). The model consists of an ELT, a parasitic bipolar transistor, and a substrate resistor. The ELT is decomposed into edge and corner transistors by solving the electrostatic field problem through the conformal mapping method, and these transistors are separately modeled by BSIM (Berkeley Shortchannel IGFET Model). Fast simulation speed and easy implementation is obtained as the model can be incorporated into standard SPICE simulation. The model parameters are extracted from the critical point of the snapback curve, and simulation results are presented and compared to experimental data for verification.
Keywords:electrostatic discharge  enclosed-gate layout transistor  modeling  conformal mapping
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