| 类金刚石膜的性能及应用研究 |
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| 引用本文： | 雍志华 邓明. 类金刚石膜的性能及应用研究[J]. 材料工程, 1997, 0(1): 3-7 |
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| 作者姓名： | 雍志华 邓明 |
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| 作者单位： | [1]四川联合大学 [2]四川省化学工业总公司 |
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| 摘 要： | 研究了利用低能离子束技术，在单晶硅片等多种基体表面形成类金刚石薄膜（ＤＬＣ膜）的工艺，测试了其物理化学力学性能，在硅片，硅太阳电池和半导体等表面进行了形成类金刚石膜的应用研究。
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| 关 键 词： | 类金刚石膜 低能离子束 性能 DLC 薄膜 |
Properties and Applications of the Diamond Like Carbon Films |
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| Yong Zhihua Lin Xigang Liu Wei. Properties and Applications of the Diamond Like Carbon Films[J]. Journal of Materials Engineering, 1997, 0(1): 3-7 |
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| Authors: | Yong Zhihua Lin Xigang Liu Wei |
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| Abstract: | The technology of diamond like carbon (DLC) films on singlecrystal silicon and other substrates was studied by low-energy ion beam deposition. Properties of DLC films were tested and applications were investigated. |
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| Keywords: | diamond like carbon film low-energy ion beam property application |
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