集成电路虚拟制造系统

结合集成电路虚拟制造系统的设计，给出集成电路虚拟制造的系统结构，讨论了系统设计中的两个关键问题，既开放式集成框架软件的七发和集成电路制造系统的建模，在开放式集成框架的支持下，把各种异质仿真软件集成起来，得到支持面向任务的可控工艺流设计和产品可制造性分析能力，另一方面，通过制造系统建模技术，得到制造系统模型，该模型要支持生产过程的优化调度，并在调度结果基础上产生实际的生产控制过程，以集成电路的计算机集成制造系统为依托完成实际的产品制造。

A system for virtual manufacturing of integrated circuits

Based on the design of a system, VirMIC, for virtual manufacturing of integrated circuits, this paper discusses two key supporting technologies, i.e., the development of an open framework for the integration of various heterogeneous simulation software and the modeling technology to construct the model of manufacturing system. The framework must support a task oriented environment for the user to design the process procedure in a controllable mode and analyze the manufacturability. Through the modeling technology, the model of the manufacturing system is obtained, which facilitates optimal fabrication scheduling. Furthermore a control procedure for the manufacturing system is given on the basis of the scheduling result.