碳化钨模仁表面沉积Re-Ir抗高温黏连性涂层研究

超精密（纳米精度）模仁是模造技术制备玻璃镜片的核心部件,而模仁表面的保护涂层则决定着模仁的使用寿命及玻璃制件的成型质量与成本。本研究采用射频磁控溅射技术,在WC模仁基材表面分别镀制Re、Ir单层膜及Re/Ir复合多层膜三种膜系。通过扫描电子显微镜、表面轮廓仪、X射线衍射仪以及纳米压痕仪等对所制备涂层的表面形貌、结构以及涂层力学性能进行表征,同时采用高温润湿角测量仪结合常用的镜头玻璃硝材D-ZK3与模仁进行高温浸润测试。结果表明,涂覆三种膜系后模仁力学性能及抗玻璃高温黏连性能都得到了明显改善,且Re/Ir多层膜系综合性能优于Re和Ir单层膜系,在延续基材表面精度的同时,较大幅度地提高了模仁表面硬度及弹性模量,高温状态下与玻璃硝材浸润性明显减弱,接触界面未观察到元素互扩散现象,显示良好的应用前景。

Study of antistick Re-Ir protective coating on WC mould substrate

Precision glass moulding is a replicative process that allows the production of high precision optical components from glass without grinding and polishing. In order to enhance the mould insert"s lifetime, protective coatings can be applied. In this study, Re, Ir monolayer and Re/Ir multilayer were deposited on the WC substrate by RF magnetron sputtering deposition system respectively. SEM, XRD, Nano Indenter and contour graph were used to characterize those protective coatings. The wetting angle at high temperature was adopted to evaluate the sticking situation between mould and D-ZK3 glass. The results demonstrated that the mechanical property and antistick performance of the mould after coating were both improved significantly. Re/Ir multilayer shows best antistik capability as well as mechanical property among these three types of coating. Meanwhile, the glass after wetting contact test with Re/Ir multilayer coating still have high transparency, which demonstrate that almost no interfacial reaction between glass gob and protective coating happened. This study displays a promising application of Re/Ir multilayer protective coating in glass moulding technology.