平面波导硅基结构表面的APTES修饰研究

3-氨丙基三乙氧基硅烷（APTES）是一种常用的表面修饰剂，通过化学键合的方式覆盖在硅结构表面形成APTES膜层，用以链接功能性生物分子。本文基于平面波导生物传感器器件的研究，通过对结构表面膜层的物理化学特性进行分析，对实验方案进行优化，降低表面微粗糙度，提升生物分子膜层的活性。文中在相同的实验环境下，将APTES分别溶于PBS、乙醇、甲苯溶液，进行APTES分子膜的生成，通过原子力扫描显微镜（AFM）、接触角测试仪、X-射线光谱仪（XPS）对不同样品表面微粗糙度（RMS）、接触角、成分等物理化学特性进行分析，确定应用于光学生物传感器器件APTES表面修饰的最佳配剂，为提高平面波导生物传感器的灵敏度提供了理论支持。

The Research of APTES Modification on Silicon Structure Surface based on Planar Waveguide

3-Aminopropyltriethoxysilane (APTES) is a kind of common surface modification agents, which can be covered on the silicon structure surface by chemical bonding to link functional biological molecules. Based on the research of Planar Waveguide Bio-sensor devices, this paper analyzed surface film layer physical and chemical characteristics, optimization the experiment scheme, to make micro roughness lower and improve biological molecular film activity. In this paper, APTES is dissolved separately in PBS, ethanol and toluene to form APTES molecular film under otherwise equal conditions. Physical and chemical properties like Root Mean Square (RMS), contact angle and component of different sample surfaces are analyzed by Atom Forces Microscope (AFM), Contact Angle Tester and X-ray Photoelectron Spectroscopy (XPS). Finalized the best solvent of surface modification on Si structure with APTES applying on optical biosensor and provided theoretical support for improving the sensitivity of planar waveguide optical biosensors.