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超精密加工精度分析
引用本文:戴一帆,李圣怡.超精密加工精度分析[J].中国机械工程,1999,10(2):203-206.
作者姓名:戴一帆  李圣怡
作者单位:1. 长沙市,410073,国防科技大学精密机械与仪器系
2. 长沙市,410073,国防科技大学
基金项目:国家自然科学基金!59675037
摘    要:介绍超精密加工技术概要;从加工精度角度出发分析超精密加工技术国内外动态及今后发展的目标;探讨进一步提高主轴和导轨运动精度以及微进给和超精密测量精度等的可能性和关键技术问题;展望超精密加工技术在微细加工领域的发展前景。

关 键 词:超精密加工  误差补偿  加工精度  机床

Machining Accuracy Analysis of Ultra-Precision Machining Process
Dai yifan,Li Shengyi.Machining Accuracy Analysis of Ultra-Precision Machining Process[J].China Mechanical Engineering,1999,10(2):203-206.
Authors:Dai yifan  Li Shengyi
Abstract:The technique of ultra-precision machining is sumnlarized in the paper. As viewed from machining accuracy, the domestic and international developing trends alld goals are analyzed firstly. SOme key problems and possibility for improving accuracy of the spindle,guide, micro-feed device and ultra-precision measurment are discussed deepIy. Finally,the future of ultra-precision machining and micro-machining is also described ill this paper.
Keywords:Ultra-precision machining error compensation machining accuracy machine tool
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