Charging compensation of alumina samples by using an oxygen microinjector in the environmental scanning electron microscope |
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Authors: | Quan Xueling Ji Yuan Zhang Hong Zhang Yinqi Xu Xuedong Zhong Taoxing |
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Affiliation: | Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing, China. |
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Abstract: | A gas microinjector system was set up in an environmental scanning electron microscope (ESEM) to create an oxygen atmosphere around the alumina samples for the charging compensation under a pressure between 2 x 10(-5) Pa approximately 2 x 10(-2) Pa. At low pressures, the skirt effect of the electron scattering can be degraded, which results in improvement of the imaging contrast and increase of the signal/noise ratio. The sample current (I(SC)) and the Duane-Hunt limit were measured to evaluate the charging effect. |
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Keywords: | environmental scanning electron microscope microinjector charging effect oxygen atmosphere alumina |
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