三坐标测量机动态误差的建模方法

为了提高三坐标测量机的测量速度，缩短测量周期，分析了影响给定的三坐标测量机动态误差的因素。对三坐标测量机的具体和了分析，用电感测微仪进行了动态偏转角的测量，并推导出由动态偏转误差得到测头处的动态位移误差的方法。同时，对由导轨的直线度造成的误差进行了讨论。指出动态误差主要是由各构件绕气浮导轨连接处的偏转和各运动构件本身的弯曲变形造成挫理论上可以证明，在气浮导轨力矩刚度和横梁弯曲刚度已知的情况下，只要

Modeling of the Dynamic Errors of Coordinate Measuring Machines

To increase the measuring speeds of coordinate measuring machines (CMMs) and shorten the cycle time of measuring tasks, the factors affecting on the dynamic errors of a coordinate measuring machine are an alyzed in this paper. It is pointed out that the main contributors to the dynamic errors are the rotation of the elements around the joints of air-bearings and their bending. An analysis is made according to the structure of a coordinate measuring machine. The dynamic rotational errors are measured with inductive position sensors. A method to get the displacement error at the probe from the rotational errors is presented. The errors caused by the linearity of the guideways are also discussed in this paper. It is proved theoretically that dynamic displacement error at the probe can be derived from the measured rotational errors of carriages when both the stiffness of the air pads and that of the x-traverse are given.