| 聚合物微纳结构热压机的温度控制策略研究 |
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| 引用本文： | 刘冲,彭佳,李经民,刘军山. 聚合物微纳结构热压机的温度控制策略研究[J]. 微纳电子技术, 2008, 45(1): 45-50 |
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| 作者姓名： | 刘冲 彭佳 李经民 刘军山 |
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| 作者单位： | 1. 辽宁省微纳米技术及系统重点实验室,辽宁,大连,116023;大连理工大学,精密与特种加工技术教育部重点实验室,辽宁,大连,116023
2. 辽宁省微纳米技术及系统重点实验室,辽宁,大连,116023 |
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| 基金项目： | 国家科技支撑计划资助项目（2006BAF04813）;国家自然科学基金资助项目（50605006） |
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| 摘 要： | 设计实现性能良好的温度控制是聚合物微纳热压工艺探索及高质量热压加工的必要条件。对热压机温控系统进行了建模分析;将飞升曲线法和最小二乘法相结合,对系统进行了辨识;针对系统模型参数的不确定性,设计并实现了基于系统辨识整定控制参数的PID(比例-积分-微分)控制器。实验证明,此控制器超调量0.5℃、系统稳态误差±0.2℃,并且有良好的适应性,满足微纳热压工艺要求。
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| 关 键 词： | 热压 温度控制 系统辨识 PID控制器 |
| 文章编号： | 1670-4776（2008）01-0045-06 |
| 收稿时间： | 2007-09-17 |
| 修稿时间： | 2007-09-17 |
Research on Temperature Control of Polymer Micro/Nano Hot-Embossing System |
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| Liu Chong,Peng Jia,Li Jingmin,Liu Junshan. Research on Temperature Control of Polymer Micro/Nano Hot-Embossing System[J]. Micronanoelectronic Technology, 2008, 45(1): 45-50 |
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| Authors: | Liu Chong Peng Jia Li Jingmin Liu Junshan |
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| Affiliation: | Liu Chong1,2,Peng Jia1,Li Jingmin1,Liu Junshan1 (1. Key Laboratory for Micro/ Nano Technology , System of Liaoning Province,2. Key Laboratory for Precision , Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116023,China) |
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| Abstract: | Temperature is one of the important parameters in polymer micro/nano hot-embossing structures. It is essential to design and implement a high performance temperature controller to investigate the hot-embossing technology. The model of the hot-embossing temperature system was established. Stepping response method and least square fitting were used to identify the system. A self-tuning PID controller based on system identification control parameters was designed in view of the uncertainty of the model paramet... |
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| Keywords: | hot-embossing temperature control system identification PID controller |
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