微结构气敏传感器的热分析与结构设计

微结构气敏传感器由于其微型化、低功耗、易阵列化、易智能化、易批量生产等独物优点，受到国内外研究者的广泛重视。本文分析膜片型微结构气敏传感器基本单元的热学行为，用有限元方法模拟计算多种不同电极结构的器件功耗及工作区温度分布，提出了进一步降低黛耗改善工作区温度均匀性的途径和方法，并讨论了微结构气敏传感器设计中应着重考虑的问题。

Thermal Analysis and Structural Design of Membrane-Type Micro Gas Sensor

Much attention has been paid to micro gas sensors recently because of their adva ntages, e.g., miniaturization, low power consumption, ease of integration (into arrays of with circuitry) and batch production, etc. In this paper, the thermal analysis of membrane type micro gas sensor has been carried out. Finite element method (FEM) was used to calculate and simulate the power consumption and the t emperature distribution of active area for various electrode structures. Solutio ns to lower power consumption further and to improve temperature uniformity in active area were put forward and some important points for the design of micro g as sensor were discussed.