| 反射率计超高真空动密封馈入系统的研制 |
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| 引用本文： | 薛松,刘伟.反射率计超高真空动密封馈入系统的研制[J].真空,2005,42(3):43-44. |
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| 作者姓名： | 薛松 刘伟 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,吉林,长春,130033 |
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| 摘 要： | 结合在NSRL同步辐射光束线和实验站的实际工作,对新设计的超高真空高精度同轴旋转平移差分馈入系统的密封型式和结构进行了描述,本系统可以完成超高真空条件下的高精度旋转平移轴系的馈入,已在NSRL反射率计实验站上得到成功使用.
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| 关 键 词： | 超高真空 密封 馈入系统 差分 |
| 文章编号： | 1002-0322(2005)03-0043-02 |
Development of feed through system of UHV motive sealing for reflectometer |
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| Xue Song,LIU Wei.Development of feed through system of UHV motive sealing for reflectometer[J].Vacuum,2005,42(3):43-44. |
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| Authors: | Xue Song LIU Wei |
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| Abstract: | Based on the practical experience in NSRL(National Synchrotron Radiation Lab) beamline and experiment station, a differential feedthrough system for high-precision seal motion as co-axial rotation/translation under UHV condition was newly developed and its sealing type and construction are discussed. The system has been proved available to meet the requirements for such motive sealings and successfully applied to the NSRL reflectometer. |
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| Keywords: | UHV motive sealing feedthrough system difference |
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