Rutile TiO2 microwave dielectric ceramics prepared via cold sintering assisted two step sintering |
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Authors: | Enda Zhao Jianyu Hao Xian Xue Mingming Si Jing Guo Hong Wang |
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Affiliation: | 1. State Key Laboratory for Mechanical Behavior of Materials & School of Microelectronics, Xi’an Jiaotong University, Xi’an, 710049, China;2. Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China;3. Shenzhen Engineering Research Center for Novel Electronic Information Materials and Devices, Southern University of Science and Technology, Shenzhen, 518055, China |
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Abstract: | In this work, a sintering route named cold sintering assisted two step sintering process (CSP-TS) is presented to prepare rutile TiO2 ceramics with submicron grain sizes. Cold sintering process at 300 °C with tetrabutyl titanate and water as the liquid phase yields a ‘green body’ with a relatively high density of ~80 %, and finally dense (98.5–99.8 %) rutile TiO2 ceramics with grain sizes of ~600 nm can be obtained in the second sintering process at 950?1000 °C. The microstructural analysis with SEM and TEM indicates that the CSP-TS samples sintered at 950 °C have an obvious phenomenon of recrystallization, accompanying by a decrease of amorphous phases and a formation of clear grain boundaries. Besides, the rutile TiO2 ceramics prepared by CSP-TS possess excellent microwave dielectric properties with relative permittivity of 92.0–98.4 and Q × f values of 27,800?31,900 GHz. Therefore, it is feasible to utilize CSP-TS to prepare ceramics with small grain sizes at low sintering temperatures. |
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Keywords: | Cold sintering process Rutile titanium dioxide Low-temperature sintering Microwave dielectric properties Submicron/nano-ceramics |
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