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| 基于HSPMI的激光干涉位移校准系统的构建及实验研究 | |
| 引用本文： | 李庆贤,高思田,李伟,施玉书,卢明臻,陈本永.基于HSPMI的激光干涉位移校准系统的构建及实验研究[J].计量学报,2013,34(6):519-523. |
| 作者姓名： | 李庆贤 高思田 李伟 施玉书 卢明臻 陈本永 |
| 作者单位： | 1.浙江理工大学纳米测量技术实验室, 浙江 杭州 310018； 2.中国计量科学研究院, 北京 100013 |
| 基金项目： | 国家科技支撑计划（2011BAK15B09） |
| 摘 要： | 基于高稳定性平面镜干涉仪（HSPMI）构建了一套激光干涉纳米位移校准系统。描述了该系统的组成，设计了基于VME总线的数字信号处理计算机软件程序，对影响系统测量不确定度的各类误差进行了分析，得出该校准系统测量不确定度为2.93 nm。分别对系统稳定性和纳米级位移测试进行了实验，验证了构建系统的有效性和实用性。 |
| 关 键 词： | 计量学 纳米位移 激光干涉 高稳定性平面镜干涉仪 误差分析 |
A Construction of Laser Interferometer of Nanometer Displacement Calibration System Based on HSPMI and Its Experiment Research |
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| LI Qing-xian,GAO Si-tian,LI Wei,SHI Yu-shu,LU Ming-zhen,CHEN Ben-yong.A Construction of Laser Interferometer of Nanometer Displacement Calibration System Based on HSPMI and Its Experiment Research[J].Acta Metrologica Sinica,2013,34(6):519-523. | |
| Authors: | LI Qing-xian GAO Si-tian LI Wei SHI Yu-shu LU Ming-zhen CHEN Ben-yong |
| Affiliation: | 1.Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China; 2.National Institute of Metrology, Beijing 100013,China |
| Abstract: | A laser interferometer of nanometer displacement calibration system has been constructed based on high stability plane mirror interferometer (HSPMI).The layout of the calibration system is described.The data acquisition software based on VME bus has been designed for digital signal processing.Errors of the calibration system have been analyzed and the measurement accuracy is 293 nm.The results of the stability test and the nanometer displacement measurement of the calibration system demonstrate that the calibration system is effective and practical |
| Keywords: | Metrology Nanometer displacement Laser interferometer HSPMI Error analysis |
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