大面积YBCO高温超导双面薄膜的生长研究

采用倒筒式直流溅射(ICS)方法，辐射方式加热基片，通过电机带动基片旋转，在两面同时溅射沉积YBCO高温超导双面薄膜。在加热温度为850℃，总压强为35Pa，氧氩比为1∶2，靶基距50mm,基片转速5～40r／min条件下，在20mm×20mm的LaAlO

Growth of YBCO High-TcSuperconducting Thin Films on Two Sides of Substrates

Double-sided YBa2Cu3O7-x high-temperature superconducting thin films were simultaneously deposited on 20 mm×20 mm LaAlO3 crystal substrates by rotating the substrate in a radiant heater.YBCO thin films were sputtered from single inverted cylindrical sputter gun.Under the optical parameters:substrate temperature 850 ℃,total gas pressure 35 Pa,O2／Ar ratio 1∶2,the distance of 50 mm from target to substrate,substrate rotating rate of 5 r／min to 40 r／min,YBCO thin films with excellent superconducting properties were prepared,Tc0=89.1 K,ΔTc=0.2 K,Jcl=2.69 MA／cm2, Jc2=2.74 MA／cm2(77 K,0 T),Rsl=0.24 mΩ，Rs2=0.29 mΩ(77 K,10 GHz,0 T).The differences of the superconducting properties and the thickness of the YBCO thin films between the two sides are very small.These samples are good enough to fabricate microwave passive devices.