干式涡旋真空泵涡旋齿应力与变形研究

为了研究涡旋真空泵涡旋齿在气体力作用下的应力分布及变形规律,利用三维建模软件建立双级定涡旋盘有限元分析模型,结合气体流动特性,分析了串联模型两级间气体压力。基于涡旋真空泵涡旋盘的几何理论和力学理论将涡旋齿受到的气体力分解为切向、径向和轴向3个气体力分量,采用有限元分析的方法对双级定涡旋齿进行应力和变形分析。由分析结果可知,吸气侧第一级三头涡旋齿比排气侧第二级单头涡旋齿的变形量小且变形波动小;在4种不同主轴转角下,涡旋齿的最大变形位置均发生在排气腔内,且位于涡旋齿齿顶部,最大等效应力发生在涡旋齿齿根部;得到在气体力作用下涡旋齿的径向变形和轴向变形情况,对真空泵密封的设计提供了一定的理论依据。

Research on the Stress and Deformation of the Scroll Wraps of the Dry Scroll Vacuum Pump

To investigate the stress distribution and deformation law of scroll vacuum pump's scroll wraps under action of gas force, the finite element analysis model of double-stage fixed scroll plate was established by modeling software. According to the gas flow characteristics, series model gas pressure between two stages was analyzed. Based on the geometric theory and mechanics theory of the scroll plate force, the gas force on the scroll wraps was divided into three components: tangential, radial and axial gas forces. The stress and deformation of the double-stage fixed scroll wraps were analyzed by the finite element method. The results show that compared with the second stage of single head scroll on the exhaust side, the deformation and the deformation fluctuation of the first stage three head scroll on the suction side are smaller. Under different spindle angles, the maximum deformation position of the scroll wrap occurs at the top of the scroll wraps in the exhaust cavity, and the maximum equivalent stress occurs at the root of the scroll wraps. The radial and axial deformation of the scroll wraps are obtained under the action of the gas force.