双端固定音叉式硅微机械谐振器的研究与应用

提出了一种使用双端固定音叉的新型结构的谐振式硅微机械加速度计。它用硅梁侧壁形成的静电电容进行激振，并通过在音叉臂上制作的压敏电阻检测振动。该加速度计输出的是频率信号，具有精度高、抗干扰能力强的优点。探讨了传感器的工作原理，并用有限元方法进行了仿真模拟，结果显示传感器的灵敏度约为2Hz/g。

A Study and Application of Silicon Micromachined DETF Resonators

Double-ended tuning fork (DETF) is a self-balanced resonator with simple structure and is unnecessary to have a vibration isolator in its application. Recently, it has been considered highly attractive in the MEMS field. This paper discusses the vibration characteristics and the sensing principle of the DETF first, and then presents a new design of silicon micromachined resonant accelerometer with DETF resonators. In this structure, the side walls of the silicon beams are used as driving electrodes and the piezoresistors on the tines act as the detection units. This accelerometer outputs frequency signal and benefits the advantages of high accuracy and good immunity to environmental interference. The working principle of the sensor is demonstrated in detail and the sensitivity is about 2Hz/g by simulation using finite element method.