| 高精度调频式电容位移传感器 |
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| 引用本文： | 陈泓波,黄向东,刘立丰,朱加兴.高精度调频式电容位移传感器[J].仪表技术与传感器,2011(12). |
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| 作者姓名： | 陈泓波 黄向东 刘立丰 朱加兴 |
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| 作者单位： | 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨,150001 |
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| 摘 要： | 设计了一种单极板调频式电容位移传感器,可实现非接触微位移测量.其原理为通过双路差频方法得到位移-频率的调制信号,再由乘法器鉴频得到位移变化量.电路包括测头及LC振荡电路、本振电路、混频下变频电路和鉴频电路.实验表明该传感器分辨力达到5 nm,并具有较好的线性度.
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| 关 键 词： | 电容 传感器 微位移 |
High-precision FM Displacement Capacitance Sensor |
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| CHEN Hong-bo
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HUANG Xiang-dong
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LIU Li-feng
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ZHU Jia-xing.High-precision FM Displacement Capacitance Sensor[J].Instrument Technique and Sensor,2011(12). |
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| Authors: | CHEN Hong-bo HUANG Xiang-dong LIU Li-feng ZHU Jia-xing |
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| Affiliation: | CHEN Hong-bo,HUANG Xiang-dong,LIU Li-feng,ZHU Jia-xing(Institute of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150001,China) |
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| Abstract: | This paper designed non-contact FM displacement capacitance sensor,which was based on the difference frequency FM technology.The circuit was consisted of two sin signal generators,down-conversion circuit and discriminator.Experimental results show that resolution of 5 nm can be achieved by this sensor,and it has good linearity. |
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| Keywords: | capacitance sensor micro-displacement |
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