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Epitaxial growth of MgO/TiN multilayers on Cu |
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| Authors: | KH Kim DP Norton DK Christen M Paranthaman |
| Affiliation: | a University of Florida, Department of Materials Science and Engineering, PO Box 116400, Gainesville, FL 32611, United States b Oak Ridge National Laboratory, Materials Science and Technology Division, Oak Ridge, TN 37831, United States c Oak Ridge National Laboratory, Chemical Science Division, Oak Ridge, TN 37831, United States |
| Abstract: | The growth of epitaxial MgO/TiN multilayer films on (001) Cu has been investigated. In particular, epitaxial structures were grown on (001) Cu layers that were epitaxial on (001) SrTiO3. X-ray diffraction and reflection high-energy electron diffraction indicate that the multilayer structures are epitaxial on the (001) Cu surface. The motivation is the use of crystalline MgO/TiN multilayers as a diffusion barrier to both copper and oxygen. MgO/TiN multilayers are potentially useful as diffusion barriers for Cu interconnects on semiconductors as well as for superconducting wires based on the epitaxial growth of cuprate superconductors on biaxially textured copper. |
| Keywords: | Oxides Epitaxy Pulsed-laser deposition Superconductivity Diffusion barriers Copper Titanium nitride Magnesium oxide |
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