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Structural and phase changes in iron-on-silicon treated by compression plasma flows |
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| Authors: | V.V. Uglov V.M. Anishchik Yu.A. Petukhou A.M. Kuzmitski |
| Affiliation: | a Belarusian State University, 4 Nezavisimosti Ave., Minsk 220030, Belarus b Belarusian State University of Informatics and Radioelectronics, 6 P. Brouka Str., Minsk 220013, Belarus c B.I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 70 Nezavisimosti Ave., Minsk 220072, Belarus |
| Abstract: | Studies of structural and phase composition changes in pre-surface layers of iron-on-silicon treated by compression plasma flows (CPFs) (power density absorbed by the target varied from 0.6 to 1.4 GWt/m2, pulse duration - 100 μs) are carried out by X-ray diffraction and scanning electron microscopy. The formation of tetragonal iron disilicide α-FeSi2, silicon dendrite formation (average tip radius ∼0.2 μm, primary spacing increases with power density of the flow from 0.6 to 2 μm) are revealed. Radiation heat losses are established to be dominant at high power densities. |
| Keywords: | Silicides Compression plasma flows Dendrites Iron disilicide |
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