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纳米复合膜的研究进展
引用本文:唐旭晟,高诚辉. 纳米复合膜的研究进展[J]. 材料保护, 2003, 36(5): 20-23
作者姓名:唐旭晟  高诚辉
作者单位:福州大学机械工程系,福建,福州,350002
摘    要:纳米复合膜是当前表面工程领域的发展前沿,综述了纳米复合膜的研究现状及进展,分析了纳米复合膜的特点、制备工艺及用途,对纳米复合膜的发展趋势提出了一些看法。

关 键 词:纳米复合膜 磁控溅射 硬度 摩擦学性能
文章编号:1001-1560(2003)05-0020-04

Development of Nano-Composite Coating
TANG Xu-sheng,GAO Cheng-hui. Development of Nano-Composite Coating[J]. Journal of Materials Protection, 2003, 36(5): 20-23
Authors:TANG Xu-sheng  GAO Cheng-hui
Abstract:The nano-composite coating is the front field in the development of surface engineering. The present status and developing tendency of nano-composite coating were summarized, and the properties, deposition techniques and application of nano-composite coating were also analyzed. Finally the trends in developing of nano-composite coating were outlined.
Keywords:nano-composite coating  magnetron sputtering  hardness  tribological property
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