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12-inch X-ray optics based on MEMS process |
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| Authors: | Ishikawa Kumi Ezoe Yuichiro Numazawa Masaki Ogawa Tomohiro Sato Mayu Nakamura Kasumi Ohashi Takaya Mitsuda Kazuhisa Maeda Ryutaro Hiroshima Hiroshi Kurashima Yuichi Noda Daiji |
| Affiliation: | 1.Institute of Space and Astronautical Science/Japan Aerospace Exploration Agency, 3-1-1 Yoshinodai, Chuo-ku, Sagamihara, Kanagawa, Japan ;2.Tokyo Metropolitan University, Tokyo, Japan ;3.National Institute of Advanced Industrial Science and Technology, Ibaraki, Japan ;4.Micromachine Center, Ibaraki, Japan ; |
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