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Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform |
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| Authors: | Guo Lianfeng Xu Lei Xu Zongke Duan Guotao Wang Yi Zhou Hong Liu Yanxiang Cai Weiping Wang Yuelin Li Tie |
| Affiliation: | 1.Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China ;2.University of Chinese Academy of Sciences, Beijing, 100049, China ;3.Key Lab of Materials Physics, Anhui Key Lab of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei, 230031, Anhui, China ;4.East China Research Institute of Electronic Engineering, Hefei, 230088, Anhui, China ; |
| Abstract: | Micro-nano fusion gas sensors integrating two-beam micro-hotplatform with nanostructured porous film were fabricated in this study. The micro-hotplatform (MHP) was manufactured using standard micro-electro-mechanical systems technology in wafer runs. Based on a colloidal crystal template method, highly ordered porous tin dioxide films were in situ grown on the MHP. The as-fabricated sensors achieved the highest response at 250 °C with power consumption only 24 mW. Due to the low thermal capacity and ordered porous thin films of the sensor, the response time was about 2 s. The sensors are sensitive to ethanol in a large range from 0.1 to 250 ppm. The developed sensor here with high performance is an excellent candidate which can be incorporated into portable devices for alcohol detection such as breath analyzers. |
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