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Quantitative analysis of temperature effect on SOI piezoresistive pressure sensors |
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| Authors: | Belwanshi Vinod Topkar Anita |
| Affiliation: | 1.Electronics Division, Bhabha Atomic Research Centre, Trombay, Mumbai, 400085, India ;2.Homi Bhabha National Institute, Anushaktinagar, Mumbai, 400094, India ; |
| Abstract: | Microsystem Technologies - Quantitative analysis of the temperature effect on piezoresistive pressure sensor response for operation at 200 bar, 200 °C was carried out through... |
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