| 基于激光激发声表面波新型气体传感器的研究 |
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| 引用本文： | 姜超,刘光达. 基于激光激发声表面波新型气体传感器的研究[J]. 光电工程, 2007, 34(4): 132-135 |
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| 作者姓名： | 姜超 刘光达 |
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| 作者单位： | 吉林大学,仪器科学与电气工程学院,吉林,长春,130061 |
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| 摘 要： | 提出了一种利用激光激发声表面波,通过气体吸附性薄膜对被测气体进行检测的传感原理.激光在覆有选择性气体吸附膜的铝块表面激发出声表面波,后者沿铝块表面传播.在吸附性薄膜与被测气体发生反应后,声表面波的强度被改变;然后利用PMT(光电倍增管),通过单芯光纤耦合的反射式光束偏转法探测由半导体激光器发出的探测光束,所检测的光强的变化反映了被检测气体的浓度,从而实现被测气体的浓度测量.
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| 关 键 词： | 声表面波(SAW) 吸附性膜 气体传感器 光偏转法 |
| 文章编号： | 1003-501X(2007)04-0132-04 |
| 收稿时间： | 2006-05-20 |
| 修稿时间： | 2006-05-20 |
Gas sensor based on detecting the SAW generated by laser |
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| JIANG Chao,LIU Guang-da. Gas sensor based on detecting the SAW generated by laser[J]. Opto-Electronic Engineering, 2007, 34(4): 132-135 |
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| Authors: | JIANG Chao LIU Guang-da |
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| Affiliation: | College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130061, China |
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| Abstract: | A new gas sensor was developed based on detecting the Surface Acoustic Wave (SAW) generated by laser and adsorptive film. The SAW pulses were generated on the sample of aluminum plate being covered with adsorptive film, and then spread along the surface of the sample of aluminum plate. With the result of the reaction of the absorptive film and the gas, the amplitude of the SAW was reduced accordingly. As a result, the gas concentration can be detected by using the optical beam deflection technique with a single fiber. |
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| Keywords: | Surface acoustic wave Adsorptive film Gas sensor Optical beam deflection technique |
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