高分辨率差线栅位移传感器研究

对提出的差线栅位移传感器进行了介绍,其发明思想来源于游标卡尺的细分原理。它利用相对运动的两套标尺刻线数之差,在相同刻线条件下,在栅线之间形成了更多的物理量变化特点,得到更多的原始脉冲信号,等效于脉冲倍频或插值,达到提高分辨率的目的。介绍了这种传感器的设计思想、工作原理、波形分析、精度分析和样机试验效果等。传统的栅线刻制时只要求均匀,而研究结果证明,差线栅刻线的粗细、稀密,差线数大小将直接影响信号的多少、大小、波形和精度,因此将对传统的栅式位移传感器技术产生重要影响。

STUDY ON DIFFERENTIAL GRATING DISPLACEMENT SENSOR WITH HIGH RESOLUTION

A new sensor called differential reticle grating displacement sensor is proposed for the first time. This invention is sourced from the idea of vernier caliper. Using the scale differential of two scaled parts with relative motion, in the condition of the same reticles changes of some physical parameter can be formed between the reticles. It can gain more pulse signals, which has identical effect of pulse interpolation or frequency doubling. And the goal of improving resolution can be attained. The design idea, the working principle, the wave analysis, the precision analysis and the experiment effect of the sensor are introduced. The research result shows that thickness, spacing and number of the reticles can affect directly the number, amplitude, wave shape, accuracy and other characteristic of the pulse signal. It will play an important role to improve the traditional grating type displacement sensor technology.